独立式化学浓度监测仪
一系列用於湿式製程所使用的各种化学品的化学浓度监测仪。
可以從 100 多種不同的應用中選擇適合化學品的最佳模型。可以即時測量每種成分的濃度，並使用警報來發出通知，以指示化學交換和自動補充的時間。可以實現較短的測量週期，以即時地追蹤濃度變化。
Real-time Concentration Tracking
Achieve concentration management for a 300mm process with measurement cycles of approximately 3 seconds. Supports precise concentration management for various types of cleaning equipment.
Simple Management
Measurement is fully automated, without the need for manual control once the measurement has started. Users can achieve easy management by simply injecting the chemical. Furthermore, since reference spectrum measurements use air, water is not required as a utility for routine measurements.
Prevention of Bubbles
A degassing function has been incorporated to separate bubbles from liquids just before the flow cell. Possible to take continuous measurements while the liquid is flowing.
Model name | CS-100 |
|---|---|
| Measurement principle | Absorption spectroscopic method |
| Sample temperature | 20 to 30 Degree C |
| Ambient temperature | 20 to 25 Degree C |
| Components | Max. 4 components |
| Chemical range | Max. 4 ranges |
| Communication | Parallel I/O, Analog output, RS-232C |
| Analog output (4-20 mA) | Max. 2 components |
| Dimension | 205(W) X 329(D) X 269(H)mm |
| Power source | DC 24V |
| Consumable parts | Halogen lamp |
| Wavelength | UV/NIR |
| Wetted material | PTFE, PFA, Sapphire or Quartz |
Schematics
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