蓝鲸体育直播

HE-960H-TM-S

高精準度罢惭础贬浓度监测仪

高精度 TMAH 濃度監測儀，非常適合顯影液 TMAH 濃度管理。

採用高度耐化学腐蚀的碳感测器，可高精度测量光阻显影剂溶液的主要成分罢惭础贬浓度。

CONDChemical Concentration

AC(100-240V)Transmission OutputContact OutputSingle Component

事业部: Semiconductor
产物分类: Wet Process Control
製造商: 蓝鲸体育直播 Advanced Techno Co., Ltd.

High Precision

Concentration: 0–3%, Conductivity: 0–1000 mS/cm, Repeatability: Capable of TMAH concentration measurements within ±0.003wt%

Automatic Switching for Display Range

Automatic switching of display range from high concentration to low concentration.  Additionally, it is possible to monitor changes while maintaining effective conductivity resolutions.

3 Measurements

Capable of three measurements, TMAH concentration, conductivity, and temperature.

Concentration Conversion Function

Concentration conversion is possible by inputting the relationship between the chemical concentration and conductivity along with temperature characteristics.  It is particularly suited for the dilution management of low-concentration chemicals.

Model nameHE-960H-TM-S
Target of measurementTMAH
Measurement rangeConcentration: 0 - 3%, Conductivity: 0 - 1000mS/cm
RepeatabilityWithin +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)
LinearityWithin +/- 0.003wt% (Using equivalent input for conductivity)
Transmission outputNumber of output: 4
Contact outputOutputs: 5 points
Communication outputRS-485
Power supply24V DC +/- 10% 10W
Compatible sensorFES-510 Series
Wetted material of sensorGC, PFA, Karletz?

Schematics

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