蓝鲸体育直播

CS-700

高精度、高稳定性化学浓度监测仪

能够準确测量半导体製造过程所使用的混合溶液中各成分的浓度。

非常适合控制多组分化学品。它有助於加强半导体製造流程的品质控制,同时提高化学品管理的準确性。

Chemical Concentration

DC24VTransmission OutputContact OutputRS-232CMulti Component

事业部: Semiconductor
产物分类: Wet Process Control
製造商: 蓝鲸体育直播 Advanced Techno Co., Ltd.

Compatible with Multi-component Chemicals

Accurate measure mixtures of up to eight components of chemicals can be taken.

Zero Reagent Requirements

Since component separation is accomplished through an optical measurement method without the need for reagents, it also contributes to cost reduction in the production process.

Measurement Range and Repeatability

Unit : mass%

 ComponentMeasurable rangeRepeatability
1st solutionHNO330.0 - 34.0±0.5
HF2.00 - 4.00±0.10
H3PO435.0 - 39.0±0.6
H2SiF60.00 - 3.00±0.50
H2O25.0 - 33.0±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

  • Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
  • The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

 

itemCS-100CS-700
Measurement principleAbsorption spectroscopic methodAbsorption spectroscopic method
Sample temperature20 to 30 Degree C20 to 30 Degree C
Ambient temperature20 to 25 Degree C20 to 30 Degree C
ComponentsMax. 4 componentsMax. 8 components
Chemical rangeMax. 4 rangesMax. 6 ranges
CommunicationParallel I/O, Analog output, RS-232CParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 componentsMax. 6 components
Dimension205(W) X 329(D) X 269(H)mm218(W) X 391(D) X 213(H)mm
Power sourceDC 24VDC 24V(Same connecter of CS-100)
Consumable partsHalogen lampHalogen lamp (Same as CS-100 type)
WavelengthUV/NIRUV/NIR
Wetted materialPTFE, PFA, Sapphire or Quartz,PTFE, PFA, Sapphire,
Kalrez 4079 O-ring

Schematics

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