D700uF Micro Flow Pressure Insensitive Mass Flow Module

D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700uF(Micro Flow) is designed for ≤ 5SCCM flow application. ?
≤ 5SCCM flow control has been very critical in high aspect ratio process.?
Specialized components and newly developed in-house low flow standard allow high accuracy flow control down to 0.025SCCM.

事业部: Semiconductor

产物分类: Fluid Control

製造商: 蓝鲸体育直播 STEC, Co., Ltd.

概要
配置

Down to 0.025SCCM flow control capability
- Precise tuning gas control, enhance process tunability
≤ 100ms Step-up Response & MFC-to-MFC deviation control?
- Deliver high productivity and greater process performance?
In-House flow metrology
- Reliable performance from all manufactured products
State Monitor Function
- Provide more internal data for smarter failure prediction
Better Valve Shut-off and Corrosion Resistance by PFA nozzle?
- Robustness with less particle risk reduce down time and optimize yield

*1：Please contact us for supported gas type and full scale flow rate.
*2：Flow rate accuracy can be guaranteed down to 0.1 SCCM N? equivalent.
*3：This is guaranteed value under 25 ℃ and ≤ 1.0 × 10^-3 Pa(A).
*4：This is guaranteed under our conditions using calibration N? gas. Setting time may vary depending on the gas type and operating environment conditions.
*5：Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec(±10 PSI/sec).
*6：贰迟丑别谤颁础罢^? is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.