蓝鲸体育直播

CS-600F

光纤式化学浓度监测仪

光纤化学浓度监测仪,设计用於测量半导体製造过程(例如清洁和蚀刻)中使用的化学物质。

可以实现先进湿式製程所必需的高温化学品的测量。实现快速、稳定且节省空间的解决方案,从而优化并提高化学品管理的精确度。

Chemical Concentration

DC24VTransmission OutputContact OutputRS-232CHigh TemperatureMulti Component

事业部: Semiconductor
产物分类: Wet Process Control
製造商: 蓝鲸体育直播 Advanced Techno Co., Ltd.

Stable Measurement of High-temperature Chemicals

Due to superior optical systems and algorithmic procedures, it has become possible to obtain stable measurements of chemical solutions even under the conditions of high temperature (20?80℃) without the need for adjustments or further processing. Additionally, it does not require the operator to cool the chemicals.

Up to Six Types of Chemicals (chemicals or ranges) are Supported

Measurements of up to six types of chemicals (chemicals or ranges) are possible with a single monitor.  Desired types of chemicals or ranges can be freely specified for measurement, allowing for a wide range of measurement needs.

Free Layout

With the flexibility to place and accommodate the installation space of chemical supply units or cleaning equipment, the light source unit and the monitor unit can be installed separately.

Reduced Equipment Downtime

By reducing the frequency of background adjustments in the inline measurements, equipment downtime is significantly reduced, greatly contributing to throughput improvement.

ModelCS-600F
Measurement
principle
Absorption spectroscopic method
Calculation
principle
Temperature compensation type multivariate analysis
Measurement targetNH3/H2O2/H2O (reperesentative specification)
* Please contact 蓝鲸体育直播 regarding other chemicals.
Measurement rangeNH3:0.00~1.20尘补蝉蝉%、贬2O2:0.00~5.50尘补蝉蝉%、
H2翱:93.3~100.0尘补蝉蝉%
RepeatabilityNH3:±0.05尘补蝉蝉%、贬2O2:±10尘补蝉蝉%、贬2翱:±1.0尘补蝉蝉%
Chemical temperature: Within ±1℃/1 hour
Sample solution
temperature
20?80℃
Measurement cycleApprox. 3 seconds
LCD
display
(1) Measured value (%)
(2) Concentration alarm (HH/H/L/LL)
(3) Error code (EXXX)
(4) Chemical temperature (°C)
(5) Serial/parallel communication status (P/S)
(6) The times of background correction failure (CXXX)
Key input(1) Concentration alarm setting (HH/H/L/LL)
(2) Concentration value shift
(3) Background correction
(4) Hot water correction
(5) Temperature dependent concentration shift
Parallel
input
Input voltage of 12 V to 30 V DC by insulating with photo coupler
(1) Parallel concentration alarm output (On/Off)
(2) Switching chemical solution for measurement
(including background correction)
(3) Hot water correction
Parallel
output
Transistor output (NPN open collector) by insulating with photo coupler
Maximum current when powered ON: 5 mA DC (no internal protective resistance)
Maximum voltage when powered OFF: 30 V DC
(1) Concentration alarm (ON at HH/H/L/LL alarm)
(2) Monitor error (OFF at error)
(3) Measuring (ON at measurement)
(4) Chemical solution type for measurement
(5) Echo to hot water correction input
(6) Warning (ON at occurred)
(7) Background correction status 8) Hot water correction status
Serial inputRS-232C
(1) Request for readout of measurement data
(2) Select chemical solution type to be measured
(3) Hot water correction
Serial
output

RS-232C
(1) Measured data No.
(2) Chemical solution type
(3) Concentration value
(4) Error code
(5) Chemical temperature

Analog
output
4 mA to 20 mA
In case of monitor error occurs, measurement is stopped or
invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution
temperature input
Terminal block inlet (terminal screw M3)
Platinum resistance temperature sensor: Pt100
(Three-conductor type, Class A) *Temperature sensor is not included.
Air
(for operation and purge)
Connection port: 4 mm O.D. quick joint,
Pressure: 0.2 MPa ±0.02 Mpa
Power source100~230V AC(Single-Phase)、50/60Hz
Power consumptionApprox. 85 VA
(transient electric current at the time of the start is excluded)
Weight(Monitor) Approx. 3.6 kg
(Lamp unit) Approx. 2.8 kg
(Sample cell) Approx. 1.2 kg
Ambient temperature(Monitor, Lamp unit) 20°C to 30°C
(Sample cell, Optical fiber) 20°C to 35°C
(Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity(Monitor, Lamp unit, Sample cell) 40% to 70%
(Should be no dew condensation)
Slanting angle at installation(Monitor, Lamp unit) within ±1°
Optical fiberLength: 5 m, minimum bend radius: R 150 mm

Schematics


 

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