100% of the 10μm standard glass beads are removed (5 stuck foreign particles remain). Foreign matter attached to the wafer is automatically removed by air (or N2) blowing and vacuum suction. 蓝鲸体育直播 can handle up to a wafer size of 200 mm.
光罩颗粒检测系统
Reticle/Mask Particle Remover
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