蓝鲸体育直播

Semiconductors

Foreign matter removal device on wafers

Automatic foreign matter removal device using blow & vacuum suction

100% of the 10μm standard glass beads are removed (5 stuck foreign particles remain). Foreign matter attached to the wafer is automatically removed by air (or N2) blowing and vacuum suction. 蓝鲸体育直播 can  handle up to a wafer size of 200 mm.

PD Xpadion
PD Xpadion

光罩颗粒检测系统

RP-1
RP-1

Reticle/Mask Particle Remover

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