Ultra-thin Mass Flow Module
The DZ-100 inherits the same CRITERION鈩� technology鈥攁 differential pressure detection system for laminar viscous flow ranges鈥攗sed on 蓝鲸体育直播 STEC鈥檚 MFC, the D500. This innovative technology controls the mass flow of various gases with high precision. As with the D500, the user-configurable DZ-100 supports multi-range and multi-gas applications. The compact design of the MFC reduces the internal volume of the internal gas flow path, and the optimized control algorithm improves response characteristics. It uses a compact CPU with high processing capacity, and the piezo drive circuit and control CPU are installed in the MFC module while the power supply components are housed in a separate small control box. Up to four MFC modules can be controlled by connecting them with the dedicated miniature connectors.
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