Chamber Exhaust Pressure Controller.

chamber鞚� 雮措秬鞎曤牓鞚� 鞛勳潣鞚� 臧掛棎鞚检爼頃橁矊鞝滌柎頃橂姅氚瓣赴鞎� Controller 鞛呺媹雼�. 瓿犽秳頃措姤鞚� 鞀ろ厡頃� 氇劙鞕€ 霃呾瀽甑“鞚� 氩勴劙頂岆澕鞚� 氚鸽笇鞐� 鞚橅暣瓿犾啀鞚戨嫷路瓿犽秳頃� 靹彪姤鞚� 鞁ろ槃頃橁碃鞛堨姷雼堧嫟.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: 蓝鲸体育直播 STEC, Co., Ltd.

Features
Specifications

瓿犾瓿� 雽€鞚�: 鞀ろ厫霠堨姢氤措敂毳� 毂勳毄
雮措秬鞁濎劚雽€鞚�: PTFE(攵堨唽靾橃) 毂勳毄氇嵏霃� 甑劚
氚瓣赴鞎� 鞝滌柎鞁滌姢韰滌潉甑稌: - 氙胳劯頃� 彀晻靹检劀(EMTGC1B-A
旖橅姼搿る煬(PCU-3000)毳� 甑劚
RoHS 雽€鞚�

Model EC-

5104

5105

5202

Compatible size

NW40

NW50

25 mm PTFE fitting

1 inch PTFE fitting

Materials at gas contact area

SUS316L, Fluoro rubber

PTFE, PEEK, Fluoro rubber

Conductance
(in vacuum area)

0.4 to 80L/s

0.6 to 200L/s

鈥斺赌�

Outflow at 100 mm H2O
(fully closed)

20L/min

25L/min

3L/min

* This product is subject to Japan's Export Control Law (i.e. on its control list). Before it is exported from Japan to overseas or supplied to non-residents, an Export License must be obtained from the Ministry of Economy, Trade and Industry (METI) of Japan.