Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
MICROPOLE System
Compact Process Gas Monitor
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- Extremely compact size and lightweight
1/20th size when compared to conventional residual gas analyzers making it easy to integrate to any system High performance
Mini array of 9 quadrupoles gives excellent sensitivity at a fraction of the volume of traditional quadrupolesHigh pressure operation
Can be used at up to 0.9Pa (7mTorr, 9 x 10-3mbar) resulting in the reduction or elimination of expensive vacuum pumping for many applicationsInterchangeable sensor head in calibration
The sensor heads are pre-tuned and calibrated prior to shipment allowing the user to make sensor changes in the field without the need for fine tuning or technical expertiseNetwork sensors
Up to eight sensors can be monitored by a single PC using RS-485. The systems can also be monitored remotely over EthernetUser friendly software
Micropole Scanner鈩� software allows the user to monitor partial pressures of gases in various modes e.g. trend graph, analog graph, leak mode, bar graph, 3DMonitor controller
The optional Monitor Controller can be used on the chamber mounted directly on the Spectrum Generator, allowing the user to monitor the vacuum chamber without the need for a PC
Measurement principle
The Gas Monitor consists of an ion source, a mass spectrometer, and a measurement section. The residual gas is ionized when it collides with the thermoelectrons discharged from the high-temperature filament, and the ions that are thereby created accelerate and converge onto the mass spectrometer. At the mass spectrometer, direct and alternating current voltages are applied to the four cylindrical electrodes (quadropoles), which allows the ions to be separated by mass. The separated ions are detected as electric current by the Faraday cup. The ion current is proportional to the mass (partial pressure) of the residual gas.
MICROPOLETM Analyzer
The feature that makes the Micropole System unique is the MICROPOLETM Analyzer (MPA); a grouping of nine quadropoles that takes full advantage of ultraprecision optical etching processing technology and glass/metal joint technology. The development of the MPA has enabled the creation of the world's smallest residual gas analyzer, while offering the same or better sensitivity as conventional, larger mass spectrometers. The analyzer is a plug-in unit. It features a sensor unit that has already been calibrated for partial pressures, and offers absolute total and partial pressure measurement.
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