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Fluid Control

Fluid Control

Measurement and control technology in semiconductor manufacturing process chambers

Exhibition Panels

Measurement and control technology in semiconductor manufacturing process chambers

Measurement and control technology in semiconductor manufacturing process chambers

Product Catalogs

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1.44 MB
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NEW!! High Speed & Precision Pressure Insensitive Mass Flow Module

D700MG

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1.41 MB
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NEW!! Wide Range Pressure Insensitive Mass Flow Module

D700WR

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1.76 MB
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Differential Pressure Mass Flow Controller

CRITERION D500

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1.06 MB
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Differential Pressure Ultra-thin Mass Flow Controller

DZ-100

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0.48 MB
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High Performance Thermal Mass Flow Module

SEC-Z700S Series

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1.41 MB
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Thermal Mass Flow Controller

SEC-Z500X Series

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0.6 MB
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Thermal Flow Splitter

FS-3000

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1.14 MB
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Auto Pressure Regulator

GR-511F

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0.57 MB
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High Performance Liquid Vaporization System

XF-100\MV-2000 Series

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