蓝鲸体育直播

VG Series

Capacitance Manometer

VG 鞁滊Μ歃� 旌愴尐鞁滍劥鞀� 鞎曤牓瓿勳瀰雼堧嫟. 旌愴尐鞁滍劥鞀� 毵る吀氙疙劙 VG 鞁滊Μ歃堧姅 靻岉槙鞚措┌ 鞛愳泊 鞓弰 臁办爤 鞙犿槙鞚� 鞛堧姅 鞓⿺韮堨瀰雼堧嫟.

Segment: Semiconductor
Manufacturing Company: 蓝鲸体育直播 STEC, Co., Ltd.
  • Compact self heating design
  • High performance and high stability resulting from innovative electrode structure
  • Excellent corrosion resistance with Ni alloy diaphragm
  • Set point output (2 points)
  • Alarm output
  • Range adjustment by dedicated software
  • ONE PUSH ReZero
  • Power requirements +/-15VDC or 24VDC
  • CE & RoHS compliant

 

Technical Article

(1.3MB)

Abstract
"In the deposition process or an etching process that made to be used for the fabrication of LEDs, semiconductors, FPDs and solar cells, various gases are used and the process pressure gives large effect on product quality, so the excellent corrosion resistance, and without gas dependent, and high accuracy are required to vacuum gauge . To provide solutions to these requests, 蓝鲸体育直播 STEC has developed the Capacitance Diaphragm Gauge 鈥淰G-200 Series鈥�, and the results of the performance evaluation were superior reproducibility and long term stability. Here, we describe the product features and performance evaluation results of the VG-200."

Model VG-200
Full Scale Range

133.32Pa

1.3332kPa/13.332kPa/133.32kPa
Sensor Controled Temperature55掳颁/100掳颁
Accuracy Including non-linearity, hysteresis, non-repeatability * 0.5%R.S.0.25%R.S.
Resolution0.03%F.S0.01%F.S
Zero Temp. Coefficient

0.005%贵.厂./掳颁

0.0025%贵.厂./掳颁
Span Temp. Coefficient0.03%搁.厂./掳颁0.02%搁.厂./掳颁
Operating Temperature10掳C to 45掳C(55掳C),10掳C to 50掳C(100掳C)
Response time<60msec
Warm Up time60尘颈苍(55掳颁),120尘颈苍(100掳颁)
Proof Pressure350kPa(A)
OutputAnalog 0-10V, load resistance: 10k惟 or more
Supply Voltage卤15VDC 卤5% or 24VDC卤5% @0.6Amax
SetpointContact form: 1a,1b, Number of setpoint: 2 Current charge capacity: 0.1A @30VDC

* Including non-linearity, hysteresis, non-repeatability at 25鈩� ambient temperature after 2hours operation.

Type / Specification

 

 1. Full scale2. Heater set temperature3. Fitting
VG-221

10罢锛�133.32笔补
(1Torr)

11T : 1.3332kPa(10Torr)

12T : 13.332kPa(100Torr)

13T : 133.32kPa(1000Torr)

055 : 55掳C
100 : 100掳C		KF16 : KF16
8CR : 1/2VCR-F
CF34 : ICF34

鈼� Please choose full scale,heater set temperature and fitting. 鈼� Please contact us If you need alarm initial setting.

 

External Dimension

External Dimension of Capacitance Manometer VG Series

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鞝滍拡 氍胳潣

蓝鲸体育直播鞝滍拡鞚� 鞛愳劯頃� 鞝曤炒毳� 鞗愴晿鞁滊┐, 鞎勲灅鞚� 鞏戩嫕鞐� 雮挫毄鞚� 鞛呺牓鞚� 攵�韮侂摐毽诫媹雼�.

* 電� 頃勳垬鞛呺牓頃鞛呺媹雼�.

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