蓝鲸体育直播

BHF 雴嶋弰 氇媹韯, CS-137

瓿犾劚電 頇旐暀鞎巾拡 雴嶋弰攵勳劃旮瓣赴鞚 BHF Monitor(Model: CS-137)鞚 氚橂弰觳 瓿奠爼 涓 NITRIDE 瓿奠爼鞐 靷毄霅橃柎歆電 BHF鞖╈暋, 鞚茧獏 BOE (Buffered Oxide Etch)鞖╈暋(NH4F+HF+H2O) 欷戩潣 臧 靹彪秳鞚 雴嶋弰臧掛潉 旄§爼, 響滌嫓頃橃棳欤茧姅 雴嶋弰攵勳劃旮瓣赴搿滌崹 雼れ枒頃 output鞝滉车瓿 霙办柎雮 鞛槃靹膘潉 氚旐儠鞙茧 靷毄鞛愲秳霌れ潣 BHF鞖╈暋 雴嶋弰甏毽 氚 甑愴櫂欤缄赴 甏毽ゼ 鞙勴暅 斓滌爜鞚 鞝滍拡鞛呺媹雼.

Segment: Semiconductor
Manufacturing Company: 蓝鲸体育直播 Advanced Techno Co., Ltd.
  • 3齑堨潣 旄§爼 欤缄赴搿 300mm 頂勲靹胳姢鞚 雴嶋弰甏毽ゼ 歆鞗.
    3齑堨潣 歆ъ潃 旄§爼 欤缄赴毳 鞁ろ槃. 鞁れ嫓臧勳澑 雴嶋弰於旍靹膘潉 雽韽 頄レ儊頄堨姷雼堧嫟. multibus電 氍茧, 鞗 氩勳姢 氚╈嫕鞚 靹胳爼 鞛レ箻臧 靹胳嫭頃 雴嶋弰甏毽ゼ 歆鞗愴暕雼堧嫟.
  • 旎错尒韸 靹り硠鞐 鞚橅暣 靹胳爼 鞛レ箻鞚 瓿店皠鞝堨暯頇旍棎 瓿淀棇.
    氚旊嫢氅挫爜 膦呺灅牍 鞎 2/3(*)鞚 旎错尒韸疙檾靹り硠鞐 鞚橅暣 靹胳爼 鞛レ箻鞚 瓿店皠鞝堨暯頇旍棎 瓿淀棇. 鞖╈澊頃橁矊 靹胳爼 鞛レ箻鞐 靹れ箻頃 靾 鞛堨姷雼堧嫟.
    *雼轨偓鞝滍拡CS-327瓿 牍勱祼.
  • 靹胳爼 瓿奠爼鞐愳劀鞚 搿滍姼 攵堧焿臧愳唽鞐 鞚橅暣 靾橃湪 頄レ儊.
    氇媹韯 於滊牓鞚 鞚挫毄頃挫劀 BHF鞖╈暋鞚 氤搓笁 鞝滌柎毳 頄夗晿電 瓴冹棎 鞚橅暣, 鞛槃靹膘澊 雴掛潃 靹胳爼鞚 鞁ろ槃. 靹胳爼 瓿奠爼鞐愳劀鞚 搿滍姼 攵堧焿鞚 臧愳唽鞁滌紲, 靾橃湪 頄レ儊鞐 瓿淀棇頃╇媹雼.
  • 頀 鞓ろ啝 旄§爼鞙茧, 臧勲嫧甏毽ゼ 鞁ろ槃
    靷毄鞛愲姅 BHF鞖╈暋鞚 欤检瀰頃橂姅 瓴 肟. 旄§爼鞚 頀 鞓ろ啝鞚措瘈搿, 旄§爼 鞁滌瀾頉勳潣 鞝滌柎電 鞚检泊 攵堩晞鞖旐暕雼堧嫟. 霕, reference 鞀ろ帣韸鸽熂(spectrum) 旄§爼鞚 瓿店赴毳 靷毄頃橃棳 氍检潣 雴嶋弰霃 旄§爼臧電ロ晿旮 霑岆, 鞖╈暯鞚 歃濍皽鞚措倶 旃╈溂搿滊秬韯办潣 鞖╈稖鞐 鞚橅暅 氍检潣 雴嶋弰臧 鞏混潉  靾 鞛堦碃, 靷绊檾 毵 鞐愳弓鞐愳劀 靹胳嫭頃 旎姼搿れ澊 臧電ロ暣歆戨媹雼.
  • 氩勲笖鞝滉卑鞛レ箻鞐 鞚橅暣, 鞐办啀旄§爼鞚 臧電
    頂岆鞖 靺 歆侅爠鞐 氩勲笖鞚 攵勲Μ頃橁赴 鞙勴晿鞐 氩勲笖鞝滉卑鞛レ箻鞚 雮挫灔頃橁碃, 鞎§潉 鞙犾嫟鞁滍偍 靸來儨鞐愳劀鞚 鞐办啀 旄§爼鞚 臧電ロ晿瓴 霅橃棃鞀惦媹雼.
  • DC24V毳 毂勳毄頃橁碃, 雴掛潃 鞎堨爠靹膘潉 鞁ろ槃

Model

CS-137

CS-137-2503

CS-137-1003

Measurement sample

BHF (Hydrofluoric acid/Ammonia fluoride solution)

Measurement principle

Absorption spectrometry

Concentration computation principle

Temperature-compensated multivariate analysis

Measurement range

NH4F: 15.0 to 25.0 %
HF: 0.00 to 3.00 %
H2O: 72.0 to 85.0 %

NH4F: 0.0 to 10.0 %
HF: 0.00 to 3.00 %
H2O: 87.0 to 100.0 %

Reproducibility

NH4F: 卤0.3 %

NH4F: 卤0.3 %

(Peak to peak)

 

HF: 卤0.25 %
H2O: 卤1.0 %

HF: 卤0.25 %
H2O: 卤1.0 %

Chemical

Temperature

20 to 30 掳C

conditions

Flow rate

20 to 60 ml/min.

 

Pressure

0.10 to 0.20 MPa

Measurement cycle

Approx. 3 seconds minimum

Equipment temperature

20 to 30 掳C

Operation panel

1)Temperature level display:
Ammonia fluoride solution, Hydrofluoric acid, Water

2)Alarm display (Ammonia fluoride solution, Hydrofluoric acid):
Concentration low-low limit, Concentration low limit,
Concentration high limit, Concentration high-high limit

3)Alarm value settings
(Ammonia fluoride solution, Hydrofluoric acid):
Concentration low-low limit, Concentration low limit,
Concentration high limit, Concentration high-high limit

Serial input/output

RS-232C
1)Concentration data:
Ammonia fluoride solution, Hydrofluoric acid, Water

2)Alarm value settings
(Ammonia fluoride solution, Hydrofluoric acid):
Concentration low-low limit, Concentration low limit,
Concentration high limit, Concentration high-high limit

Parallel input

12 to 30 V DC (photocoupler insulated)
Parallel concentration alarm (ON/OFF)

Parallel output

Maximum current when open collector output is ON: 5 mA
Maximum voltage when open collector output is OFF: 30 V
1)Alarm output: Ammonia fluoride solution, Hydrofluoric acid:
Concentration low-low limit, Concentration low limit,
Concentration high limit, Concentration high-high limit
2)Device error (including liquid leakage)
3)Under measurement

Analog output

4 to 20 mA (2 outputs: NH4F concentration, HF concentration)

Power

24 V DC 卤10%, 2 A

Dimensions

205 (W) x 329 (D) x 269 (H) mm

8.1 (W) x 13 (D) x 10.6 (H) in

Mass

Approx. 11 kg

Connection pipe size

For inlet and outlet: Outer diameter 6 mm (inner diameter 4 mm)

Pipe connection

Nippon Pillar Super type

鞝滍拡 氍胳潣

蓝鲸体育直播鞝滍拡鞚 鞛愳劯頃 鞝曤炒毳 鞗愴晿鞁滊┐, 鞎勲灅鞚 鞏戩嫕鞐 雮挫毄鞚 鞛呺牓鞚 攵韮侂摐毽诫媹雼.

* 電 頃勳垬鞛呺牓頃鞛呺媹雼.

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