Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Model | VC-1420 |
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Flow rate generated*1 (During TEOS generation) | Max. 5.0 CCM conversion (liquid phase conversion) |
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Liquids supported | TEOS, P(OCH3)3, C6F6 | ||
Temperature rise | Max. 150掳C | ||
Pressure generated*1 | Reduced pressure | ||
External leak integrity | &苍产蝉辫;1.0虫10-8笔补路尘3/蝉 | ||
Internal Leak Integrity | &苍产蝉辫;1.0虫10-6笔补路尘3/蝉 | ||
Wetted mateliar | 316L Stainless Steel ( polished surface ) | ||
Internal heater volume | AC 100V to 120V 70W(35Wx2) | ||
Temperature sensor used | Thermocouple K type (CA) | ||
Pressure Resistance | &苍产蝉辫;1.0惭笔补锛圙锛� | ||
Standard Fitting | Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female |
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*1 Varies depending on the type of liquid. |
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*CCM is a symbol indicating gas flow rate (mL/min at 25掳C, 101.3 kPa). | |||
External Dimension
