蓝鲸体育直播

HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

A conductivity meter ideal for the concentration management of slurry, featuring a highly chemical resistant flat carbon sensor.

By maintaining the appropriate conductivity values, it contributes to the stabilization of slurry dilution levels and the polishing process of the wafers.

COND

DC24VTransmission OutputContact OutputRS-485Single Component

Segment: Semiconductor
Manufacturing Company: 蓝鲸体育直播 Advanced Techno Co., Ltd.

High stability

Measurement ranges are 0鈭2,000 渭S/cm and 0鈭10,000 渭S/cm, with a repeatability of 卤0.5% F/S and 卤1.0% F/S, respectively, demonstrating high stability.

Metal contamination-free

With the use of a special carbon material as the electrode, there is no concern of metal contamination.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics.

鈻燬pecification conveter

Product nameConductivity meter
ModelHE-960LF
Measurement methodElectrode type锛2-electrode method锛
Temperature
specifications sensor
Platinum resistance 1000惟/鈩
Measurement
range
Cell constant0.1/cm1.0/cm
Conductivity0.00 to 20.00渭S/cm0.0 to 200.0渭S/cm
0.0 to 200.0渭S/cm0 to 2000渭S/cm
0 to 1000渭S/cm0 to 10000渭S/cm
锛奙easuring range of raw conductivity Switched with setting change
Temperature0 to 100鈩 Actual temperature measuring range depend on the performance of the sensor connected.
Concentration
conversion
Option 1,20 to 10.000% Conversion formula is defined by user
(temperature compensation and concentration conversion)
RepeatabilityCell constant0.1/cm1.0/cm 
Conductivity0.00 to 20.00渭S/cm range0.0 to 200.0渭S/cm rangeWithin 卤0.5% full scale
0.0 to 200.0渭S/cm range0 to 2000渭S/cm range
0 to 1000渭S/cm range0 to 10000渭S/cm rangeWithin 卤1.0% full scale
Temperature卤0.5鈩
ConditionEquivalent input
LinearityCell constant0.1/cm1.0/cm 
Conductivity0.00 to 20.00渭S/cm range0.0 to 200.0渭S/cm rangeWithin 卤0.5% full scale
0.0 to 200.0渭S/cm range0 to 2000渭S/cm range
0 to 1000渭S/cm range0 to 10000渭S/cm rangeWithin 卤1.0% full scale
Temperature卤0.5鈩
ConditionEquivalent input
Transmission outputNumber of output锛4
DC4 to 20mA / 0 to 20mA input/output isolated type
Maximum load resistance : 900惟
Transmission output range : Free setting within measuring range
(Negative terminals of each transmission output channel are connected inside and thus
have the same electrical potential.)
Contact outputNumber of relay锛5
ALARM contact R1,R2,R3 and R4
Contact type relay : Relay contact, SPST (1a锛
Contact rating锛240 V AC,1 A or 30 V DC, 1 A(resistance load)
Contact function Upper or lower ON/OFF alarm each measurement items.
Contact action Closed when status is in the event.
Opened when any erroneous status is normal or power is down.
R1,R2 and R3 share a common terminal.
Self diagnosis contact RF
Contact type : relay contact , SPDT (1c)
Contact rating锛240 V AC,1 A or 30 V DC, 1 A(resistance load)
C-NO contact action : Closed when status is normal. Opened when any erroneous status is
detected or power is down. R4 and RF share a common terminal.
Contact inputNumber of input锛1
Contact type锛歰pen collector. No-voltage contact
Function : Hold command
Communication outputRS-485 communication
Self-checkSensor diagnosis (Short-circuit and disconnection of the temperature sensor).
Converter error
Temperature
compensation
of conductivity
鈼 Arbitrary temperature coefficient entry
(reference temperature : 25鈩, temperature coefficient : 0%/鈩 to 5%/鈩冿級
鈼 Arbitrary temperature compensation formula entry
(reference temperature : 25鈩, formula is defined by user)
鈼 No temperature compensation is performed.
Temperature
compensation range
0 to 100鈩
The temperature compensation under 0鈩 and over 100鈩 is expanded by a function
Ambient temperature5 to 45鈩
Relative humidity锛25 to 65鈩
Power supplyRated voltage 24 V DC, 10W (max.)
StructureIndoor-use panel installation type
Panel case 锛 ABS, terminal : PBT
Panel : IP65 dust and water proof structure
Conforming standardsCE MarkingEMC Directive : EN61326-2-3
FCC RuleFCC Part15
MassApprox. 550g
External dimensions96 (W) 脳 96 (H) 脳 115 (D) mm
Case depth : approx. 105mm (when panel-mounted锛
Compatible sensorsFS-09F-1/2

 

鈻燬pecification sensor

ModelFS-09F-1/2FS-09F-1/2-200
Wetted materialGlass carbon, PFA. Kalrez庐 6375
pipe size1/2 inch
Flow rate0L/min to 10
Keep enough flow rate to measure latest sample.
Sample pressure0 to 0.3MPa (Temperature : 20 to 30 degree鈩冿級
Sample temperature20锝30 degree鈩
If the difference between the ambient temperature
and the sample liquid temperature is 5 degree鈩,
a measurement error of about 1 degree鈩 will occur.
Cable lengthApprox. 3.5m

 

Dimensions (mm)


Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

0040N-10D
0040N-10D

ISFET pH electrode

514-22
514-22

1.41 mS/cm Conductivity Standard Solution

514-23
514-23

12.9 mS/cm Conductivity Standard Solution

9371-10D Conductivity Cell
9371-10D Conductivity Cell

Conductivity Cell for Ultra Pure Water Measurement

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HC-200F
HC-200F

Field-installation Type Fluoride Ion Concentration Meter

HC-200NH
HC-200NH

Field-installation type ammonia nitrogen meter

HC-300F
HC-300F

Field-installation Type Fluoride Ion Concentration Meter

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-200FL
HD-200FL

Field-installation type optical dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-200R
HE-200R

Field-installation type electric resistivity meter (resistivity meter)

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-200R
HE-200R

Field-installation type electric resistivity meter (resistivity meter)

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-480R
HE-480R

Panel-mount type resistivity meter (resistivity meter)

HE-480R(W)
HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW
HE-960RW

Panel-mount type 2-channel electric resistivity meter (resistivity meter)

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-700A
HF-700A

Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HO-200
HO-200

Field-installation type ORP meter

HO-300
HO-300

Field-installation type ORP meter

HO-480
HO-480

Panel-mount type ORP meter

HR-200
HR-200

Field-installation type polarographic residual chlorine meter

HR-200RT
HR-200RT

Field-installation type residual chlorine meter

HR-480
HR-480

Panel-mount type galvanic residual chlorine meter

HT-110
HT-110

On-line TOC analyzer

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

LAQUA DO210
LAQUA DO210

Handheld Dissolved Oxygen/Temperature Meter

LAQUA DO220
LAQUA DO220

Handheld Dissolved Oxygen/Temperature Meter

LAQUA DS-72
LAQUA DS-72

Benchtop Conductivity/Resistivity/Total Dissolved Solids/Salinity/Temperature Meter

LAQUA EC1100 [No longer available]
LAQUA EC1100 [No longer available]

Benchtop Water Quality Meters

Corporate