Monitor chamber conditions not only during the process, but also before and after the process
Exhibition Panels
For detecting abnormalities in the chamber, checking conditions before and during the process, and predicting maintenance time
Product Catalogs
Capacitance Manometer
VG-200S
Vapor Concentration Monitor
IR-300
Gas Monitor
IR-400
Quadrupole Mass Analyzer
MICROPOLE System QL Series
Optical Emission Spectroscopy
EV2.0
Infrared Thermometer
IT-270
Infrared Thermometer
IT-480
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