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Semiconductors

Foreign matter analysis on wafers in a wide range

Analyzing foreign objects within a few square centimeters

Microscopic X-ray analyzer XGT-9000 Pro/Expert

  • Simple elemental analysis with no pre-treatment required and non-destructive
  • Introducing a new model equipped with an X-ray detector that can measure boron (B)
  • Quickly access measurement points with high-definition optical observation even in minute areas
  • A wide variety of image analysis software is also available.
XGT-9000
XGT-9000

X-ray Analytical Microscope (Micro-XRF)

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